Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

Publisher: IOP Publishing

E-ISSN: 2040-8986|17|12|125615-125622

ISSN: 2040-8986

Source: Journal of Optics, Vol.17, Iss.12, 2015-12, pp. : 125615-125622

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Abstract