Control of HF Volatile Contamination in FOUP Environment by Advanced Polymers and Clean Gas Purge

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2014|219|247-250

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2014, Iss.219, 2014-01, pp. : 247-250

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract