Industrial Challenges of TiN Hard Mask Wet Removal Process for 14nm Technology Node

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2014|219|213-216

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2014, Iss.219, 2014-01, pp. : 213-216

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract