Hydrocarbon Incorporation Effect on the Electrical Properties of Low Dielectric Constant SiCOH Films Deposited with Tetrakis(trimethylsilyloxy)silane and Cyclohexane Precursors

Publisher： John Wiley & Sons Inc

E-ISSN： 1229-5949|36|11|2677-2681

ISSN： 1229-5949

Source： BULLETIN OF THE KOREAN CHEMICAL SOCIETY (ELECTRONIC), Vol.36, Iss.11, 2015-11, pp. : 2677-2681

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