Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool

Author: Chen Yuan-Liu   Cai Yindi   Shimizu Yuki   Ito So   Gao Wei   Ju Bing-Feng  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|2|25002-25011

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25002-25011

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