Air microjet system for non-contact force application and the actuation of micro-structures

Author: Khare S M   Venkataraman V  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|1|17001-17009

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 17001-17009

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