The influence of the EUV spectrum on plasma induced by EUV radiation in argon and hydrogen gas

Author： Osorio E A   Banine V Y   Beckers J   Osorio E A  

Publisher： IOP Publishing

E-ISSN： 1361-6595|25|1|15012-15018

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15012-15018

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