Improved nanostructure reconstruction by performing data refinement in optical scatterometry

Author: Zhu Jinlong   Jiang Hao   Shi Yating   Chen Xiuguo   Zhang Chuanwei   Liu Shiyuan  

Publisher: IOP Publishing

E-ISSN: 2040-8986|18|1|15605-15610

ISSN: 2040-8986

Source: Journal of Optics, Vol.18, Iss.1, 2016-01, pp. : 15605-15610

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Abstract