Defect distribution and compositional inhomogeneities in Al0.5Ga0.5N layers grown on stepped surfaces

Author: Mogilatenko A   Knauer A   Zeimer U   Weyers M  

Publisher: IOP Publishing

E-ISSN: 1361-6641|31|2|25007-25013

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.31, Iss.2, 2016-02, pp. : 25007-25013

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