Nanostructured Ti thin films by magnetron sputtering at oblique angles

Author: Alvarez R   Garcia-Martin J M   Garcia-Valenzuela A   Macias-Montero M   Ferrer F J   Santiso J   Rico V   Cotrino J   Gonzalez-Elipe A R   Palmero A  

Publisher: IOP Publishing

E-ISSN: 1361-6463|49|4|45303-45312

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.49, Iss.4, 2016-02, pp. : 45303-45312

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