Precise identification of <1 0 0> directions on Si{0 0 1} wafer using a novel self-aligning pre-etched technique

Author: Singh S S   Veerla S   Sharma V   Pandey A K   Pal P  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|2|25012-25016

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25012-25016

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Abstract