Author： Khashayar Patricia Amoabediny Ghassem Larijani Bagher Vanfleteren Jan
Publisher： IOP Publishing
E-ISSN： 1361-6439|26|2|23002-23008
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 23002-23008
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