Author: Lu Wenshuai Jing Gaoshan Bian Xiaomeng Yu Hongyan Cui Tianhong
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|2|25021-25030
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25021-25030
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Abstract
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