Author: Higashiwaki Masataka Sasaki Kohei Murakami Hisashi Kumagai Yoshinao Koukitu Akinori Kuramata Akito Masui Takekazu Yamakoshi Shigenobu
Publisher: IOP Publishing
E-ISSN: 1361-6641|31|3|34001-34011
ISSN: 0268-1242
Source: Semiconductor Science and Technology, Vol.31, Iss.3, 2016-03, pp. : 34001-34011
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