Nanoparticle formation and dusty plasma effects in DC sputtering discharge with graphite cathode

Author： Michau A Arnas C Lombardi G Bonnin X Hassouni K

E-ISSN： 1361-6595|25|1|15019-15034

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15019-15034

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