Influence of oxidant passivation on controlling dishing in alkaline chemical mechanical planarization

Author： Shaohua Jia   Yuling Liu   Chenwei Wang   Chenqi Yan  

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.36, Iss.12, 2015-12, pp. : 126002-126005

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