Epitaxial nickel disilicide with low resistivity and excellent reliability

Author: Hsin Cheng-Lun   Deng Shiu-Sheng  

Publisher: IOP Publishing

E-ISSN: 1361-6528|27|6|65704-65709

ISSN: 0957-4484

Source: Nanotechnology, Vol.27, Iss.6, 2016-02, pp. : 65704-65709

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Abstract