Novel 3C-SiC Microstructure for MEMS Applications

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2016|858|723-728

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2016, Iss.858, 2016-06, pp. : 723-728

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract