Evolution of Threading Edge Dislocations at Earlier Stages of PVT Growth for 4H-SiC Single Crystals

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2016|858|73-76

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2016, Iss.858, 2016-06, pp. : 73-76

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