Analytical Evaluation of Thermally Oxidized and Deposited Dielectric in NMOS-PMOS devices

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2016|858|631-634

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2016, Iss.858, 2016-06, pp. : 631-634

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Abstract