Doping Fluctuation and Defect Formation in Fast 4H-SiC Crystal Growth Using a High-Temperature Gas Source Method

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2016|858|61-64

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2016, Iss.858, 2016-06, pp. : 61-64

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Abstract