Structural Changes of Titanium Dioxide Thin Films Deposited by Reactive Magnetron Sputtering through Nitrogen Incorporation

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2016|683|383-388

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2016, Iss.683, 2016-03, pp. : 383-388

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Abstract