Composition, Structure and Electrical Resistivity of ZnO_1-x Films Deposited by RF Magnetron Sputtering under Various O₂/Ar Gas Ratios

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2016|697|723-726

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2016, Iss.697, 2016-08, pp. : 723-726

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