Replacement of High-Purity Copper Target by High-Purity Copper Alloy Target in Very Large Scale Integrated Circuit

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2016|848|430-434

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2016, Iss.848, 2016-04, pp. : 430-434

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Abstract