The Influence of C₂H₂ Flow Rate on the Composition, Structural and Properties of the Ni/α-C:H Films Deposited by FCVA

E-ISSN： 1662-9752|2016|852|1132-1139

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2016, Iss.852, 2016-05, pp. : 1132-1139

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