Photoresist Development Model for Linewidth Control in the Fabrication of MCM and Customised ASICs

Publisher: Edp Sciences

E-ISSN: 1286-4897|6|11|1507-1526

ISSN: 1155-4320

Source: Journal de Physique III, Vol.6, Iss.11, 1996-11, pp. : 1507-1526

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