Nanofabrication at a 10 nm length scale: Limits of lift-off and electroplating transfer processes

E-ISSN： 1764-7177|09|PR2|Pr2-133-

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.09, Iss.PR2, 1999-02, pp. : Pr2-133-

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