Fabrication of nanoscale metal paths in oxide thin layers by noble-gas ion beams

Author: Yuasa Hiromi   Hara Michiko   Fuji Yoshihiko   Fukuzawa Hideaki  

Publisher: Edp Sciences

E-ISSN: 1286-4854|101|4|47005-47005

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.101, Iss.4, 2013-03, pp. : 47005-47005

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Abstract