Efficiency of cluster generation in a magnetron discharge

Author： Kashtanov P. V.   Smirnov B. M.   Hippler R.  

Publisher： Edp Sciences

E-ISSN： 1286-4854|91|6|63001-63001

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.91, Iss.6, 2010-10, pp. : 63001-63001

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