Low-temperature depositionof cubic boron nitride thin films

Author： Bonizzi A.   Checchetto R.   Miotello A.   Ossi P. M.  

Publisher： Edp Sciences

E-ISSN： 1286-4854|44|5|627-633

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.44, Iss.5, 2010-03, pp. : 627-633

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