Bond-breaking mechanism of sputtering

Author: Salonen E.   Nordlund K.   Keinonen J.   Wu C. H.  

Publisher: Edp Sciences

E-ISSN: 1286-4854|52|5|504-510

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.52, Iss.5, 2010-03, pp. : 504-510

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Abstract

Energetic ions are known to be able to erode atoms from a solid evenwhen a collisional mechanism cannot transfer enough kinetic energyfrom the impinging ions to substrate atoms to overcome the surfacebinding energy. Since ordinary physical sputtering models thus do notapply, the atomistic mechanisms underlying this “chemical sputtering”effect are not well understood. We now describe how low-energy ionscan cause erosion of atoms and molecules by colliding with andbreaking chemical bonds between the atoms. In the particular case ofhydrogen bombardment of amorphous carbon networks, we further showthat this can lead to erosion yields far exceeding those expected fora collisional process alone.