On the simulation of the formation and dissolution of silicon self-interstitial clusters and the corresponding inverse modeling problem

Author: Heitzinger C.   Selberherr S.  

Publisher: Elsevier

ISSN: 0026-2692

Source: Microelectronics, Vol.35, Iss.2, 2004-02, pp. : 167-171

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next