Fabrication of suspended thin film resonator for application of RF bandpass filter

Author： Kim H.H.   Ju B.K.   Lee Y.H.   Lee S.H.   Lee J.K.   Kim S.W.  

Publisher： Elsevier

ISSN： 0026-2714

Source： Microelectronics Reliability, Vol.44, Iss.2, 2004-02, pp. : 237-243

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