Epitaxial growth of anatase by reactive sputter deposition using water vapor as the oxidant

Author: Jeong B.-S.   Norton D.P.   Budai J.D.   Jellison G.E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.446, Iss.1, 2004-01, pp. : 18-22

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