Ion-assisted growth of Ti 1-x Al x N/Ti 1-y Nb y N multilayers by combined cathodic-arc/magnetron-sputter deposition

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Thin Solid Films, Vol. 302, Iss. 1, 1997-06 ,pp. : 179-192

Elsevier

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A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings

By Mayrhofer P.H.   Kunc F.   Musil J.   Mitterer C.  

Thin Solid Films, Vol. 415, Iss. 1, 2002-08 ,pp. : 151-159

Elsevier

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Phase composition and microstructure of polycrystalline and epitaxial TaN x layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition

By Shin C.-S.   Kim Y.-W.   Gall D.   Greene J.E.   Petrov I.  

Thin Solid Films, Vol. 402, Iss. 1, 2002-01 ,pp. : 172-182

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Noble gas influence on reactive radio frequency magnetron sputter deposition of TiN films

By Lungu C.P.   Futsuhara M.   Takai O.   Braic M.   Musa G.  

Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. : 635-640

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Ion-assisted pulsed magnetron sputtering deposition of ta-C films

By Bugaev S.P.   Podkovyrov V.G.   Oskomov K.V.   Smaykina S.V.   Sochugov N.S.  

Thin Solid Films, Vol. 389, Iss. 1, 2001-06 ,pp. : 16-26

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