Electrical characteristics of Ti-O/Ta 2 O 5 thin film sputtered on Ta/Ti/Al 2 O 3 substrate

Author: Kim H.-J.   Song J.-S.   Kim I.-S.   Kim S.-S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.446, Iss.1, 2004-01, pp. : 124-127

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