Rigorous electromagnetic modeling of near-field phase-shifting contact lithography

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.71, Iss.1, 2004-01, pp. : 34-53

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Inverse Problems of the Near-Field Radiothermometry

By Gaikovich K.P.

Radiophysics and Quantum Electronics, Vol. 46, Iss. 4, 2003-04 ,pp. : 239-248

Springer Publishing Company

Access to resources Recommend Favorite

On feasibility of a multiplier-less phase-shifting scheme for digital phase modulation and its VLSI implementation

International Journal of Electronics, Vol. 94, Iss. 2, 2007-02 ,pp. : 171-181

Taylor & Francis Ltd

Access to resources Recommend Favorite

Fields of linear radiators in the near-field zone

By Levin B.

Journal of Communications Technology and Electronics, Vol. 56, Iss. 1, 2011-01 ,pp. : 27-34

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Near-field Adaptive Beamformer for Robust Speech Recognition

By McCowan I.A. Moore D.C. Sridharan S.

Digital Signal Processing, Vol. 12, Iss. 1, 2002-01 ,pp. : 87-106

Academic Press

Access to resources Recommend Favorite

Near-field microwave diagnostics for medical applications

By Reznik A. Yurasova N.

Radiophysics and Quantum Electronics, Vol. 48, Iss. 10-11, 2005-10 ,pp. : 882-887

Springer Publishing Company

Access to resources Recommend Favorite