Effect of tip length and normal and lateral contact stiffness on the flexural vibration responses of atomic force microscope cantilevers

Author： Wu T.-S.   Chang W.-J.   Hsu J.-C.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.71, Iss.1, 2004-01, pp. : 15-20

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