Laser annealing of sputter-deposited a -SiC and a -SiC x N y films

Author: Fraga M.  

Publisher: Springer Publishing Company

ISSN: 0250-4707

Source: Bulletin of Materials Science, Vol.34, Iss.7, 2011-12, pp. : 1375-1378

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract