AFM lithography of aluminum for fabrication of nanomechanical systems

Author: Davis Z.J.   Abadal G.   Hansen O.   Borise X.   Barniol N.   Perez-Murano F.   Boisen A.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.97, Iss.1, 2003-10, pp. : 467-472

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