Effects of annealing conditions on humidity-sensing characteristics of SrNb x Ti 1-x O 3 thin-film resistor on SiO 2 /Si substrate

Author： Li G.Q.   Lai P.T.   Li B.   Huang M.Q.   Zeng S.H.   Liu Y.R.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.109, Iss.1, 2003-12, pp. : 95-101

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