Morphological and structural study of plasma deposited fluorocarbon films at different thicknesses

Author: Cicala G.   Milella A.   Palumbo F.   Favia P.   d'Agostino R.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 2020-2025

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