Helium effusion measurements for studying the microstructure of a-SiC:H films deposited by d.c. sputtering

Author: Saleh R.   Munisa L.   Beyer W.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 1927-1931

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