Copper nanoparticles deposited inside the pores of anodized aluminium oxide using atomic layer deposition

Author： Johansson A.   Torndahl T.   Ottosson L.M.   Boman M.   Carlsson J.-O.  

Publisher： Elsevier

ISSN： 0928-4931

Source： Materials Science and Engineering: C, Vol.23, Iss.6, 2003-12, pp. : 823-826

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