Fabrication of nanostructures using scanning probe microscope lithography

Author: Lee S.   Kim J.   Shin W.S.   Lee H.-J.   Koo S.   Lee H.  

Publisher: Elsevier

ISSN: 0928-4931

Source: Materials Science and Engineering: C, Vol.24, Iss.1, 2004-01, pp. : 3-9

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