Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

By Dai Wen  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1745-1750

Springer Publishing Company

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Soft X-ray lithography of high aspect ratio SU8 submicron structures

By Reznikova Elena  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1683-1688

Springer Publishing Company

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Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

By Vora K.   Peele A.   Shew B.-Y.   Harvey E.   Hayes J.  

Microsystem Technologies, Vol. 13, Iss. 5-6, 2007-03 ,pp. : 487-493

Springer Publishing Company

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Design and fabrication of a SU-8 based electrostatic microactuator

By Dai Wen   Lian Kun   Wang Wanjun  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 271-277

Springer Publishing Company

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Fabrication of grids and collimators using SU-8 as a mold

By Makarova O. V.   Zyryanov V. N.   Divan R.   Mancini D. C.   Tang C.-M.  

Microsystem Technologies, Vol. 10, Iss. 6-7, 2004-10 ,pp. : 536-539

Springer Publishing Company

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