Fast patterning microstructures using inkjet printing conformal masks

Author： Lin C.-H.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.14, Iss.9-11, 2008-10, pp. : 1263-1267

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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