Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer

Author: Ghim Young-Sik   Yang Ho-Soon   Lee Yun-Woo   Rhee Hyug-Gyo  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.24, Iss.7, 2013-07, pp. : 75002-75008

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