Author: Houghtaling J. Liang T. Yager P. Fu E. Spicar-Mihalic P. Toley B.
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 67003-67008
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Abstract
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