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Author: Liu Rui Shen Fangping Ding Haiyan Lin Jian Gu Wen Cui Zheng Zhang Ting
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65027-65033
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